CLEAN ROOM DEVICE WITH MOVABLE ELECTROMAGNETIC RADIATION SOURCE

Gabriele Berg (Inventor), Stefan Liebminger (Inventor), Lisa Oberauner (Inventor), Thomas Klein (Inventor), Roland Stampf (Inventor)

Research output: Patent

Fields of Expertise

@misc{1fbac1ad27ae40eea27282643d3ce2af,

title = "CLEAN ROOM DEVICE WITH MOVABLE ELECTROMAGNETIC RADIATION SOURCE",

author = "Gabriele Berg and Stefan Liebminger and Lisa Oberauner and Thomas Klein and Roland Stampf",

note = "Anmelder: ORTNER CLEANROOM ENGINEERING GMBH;; WO 2012085250",

year = "2012",

month = jun,

day = "28",

language = "deutsch",

type = "Patent",

}

TY - PAT

T1 - CLEAN ROOM DEVICE WITH MOVABLE ELECTROMAGNETIC RADIATION SOURCE

AU - Berg, Gabriele

AU - Liebminger, Stefan

AU - Oberauner, Lisa

AU - Klein, Thomas

AU - Stampf, Roland

N1 - Anmelder: ORTNER CLEANROOM ENGINEERING GMBH;

PY - 2012/6/28

Y1 - 2012/6/28

UR - http://patentscope.wipo.int/search/en/detail.jsf?docId=WO2012085250&recNum=1&maxRec=&office=&prevFilter=&sortOption=&queryString=&tab=PCT+Biblio

M3 - Patent

M1 - WO 2012085250

ER -