Direct nano-in-micro patterning of TiO2 thin layers and TiO2/Pt nano electrode arrays by Deep X-ray Lithography

Marco Faustini, Benedetta Marmiroli, Luca Malfatti, Benjamin Louis, Natacha Krins, Paolo Falcaro, Gianluca Grenci, Christel Laberty-Robert, Heinz Amenitsch, Plinio Innocenzi, David Grosso

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)3597-3603
JournalJournal of Materials Chemistry
Publication statusPublished - 2011

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Experimental
  • Application

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