Expanding Design Possibilities by Blurred Electron Beams during 3D-Nanoprinting

Research output: Contribution to conferencePosterpeer-review


Additive, direct-write manufacturing via focused electron beam has evolved into a reliable 3D nanoprinting technology in recent years. Focused electron beam induced deposition (FEBID) bases on the highly localized immobilization of surface adsorbed precursor molecules by focused electron beams and its subsequent processes. As the precursor is injected in gaseous states, this technology has low demands on substrate materials (vacuum and e-beam compatible) and surface morphology (accessible by the electron beam). By the controlled movement of the electron beam, FEBID allows the fabrication of even complex 3D structures with nanoscale features down to the sub-20 nm range. While current trends focus on closed and even bulky 3D designs, most 3D-FEBID structures in the past used meshed objects, meaning a combination of differently oriented branches, connected at some points in 3D space according to the final application. While inherently required for some concepts (e.g. 3D nano-plasmonics or magnetic lattices), the small diameters can also limit final applicability due to low mechanical rigidity, thermal- or electric conductivities. To optimize those properties without changing the general 3D design type, a controlled way for tuning individual branch diameters would be highly desirable. Following that motivation, we here introduce on-purpose beam blurring for a controlled upward scaling and study the behavior at different inclination angles. Aside the intended diameter tunability, the study reveals a massive boost in growth efficiencies up to factor 5 due to strongly changed working regime conditions. As a consequence of the latter, unwanted proximal growth beneath overhanging 3D branches is strongly reduced, which increases the reliability of 3D-FEBID. By that, the study expands the design flexibility of this technology by means of tunable diameters for meshed objects at higher volume growth rates and reduced proximal growth.
Original languageEnglish
Publication statusPublished - 22 Jan 2021
Event2021 European Congress and Exhibition on Advanced Materials and Processes : EUROMAT 2021 - Virtuell, Virtuell, Austria
Duration: 13 Sept 202117 Sept 2021


Conference2021 European Congress and Exhibition on Advanced Materials and Processes
Abbreviated titleEUROMAT 2021
Internet address


  • Focused electron beam-induced deposition (FEBID)
  • Defocus
  • nanofabrication
  • Nanogranular material
  • Platinum
  • carbon matrix

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application

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