Fabrication of advanced functional devices combining soft chemistry with X-ray lithography in one step

Paolo Falcaro; Luca Malfatti; Lisa Vaccari; Heinz Amenitsch; Benedetto Marmiroli; Gianluca Grenci; Plinio Innocenzi

doi:10.1002/adma.200901561

Fabrication of advanced functional devices combining soft chemistry with X-ray lithography in one step

Paolo Falcaro^*, Luca Malfatti, Lisa Vaccari, Heinz Amenitsch, Benedetto Marmiroli, Gianluca Grenci, Plinio Innocenzi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films. Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process. (Figure Presented).

Original language	English
Pages (from-to)	4932-4936
Number of pages	5
Journal	Advanced Materials
Volume	21
Issue number	48
DOIs	https://doi.org/10.1002/adma.200901561
Publication status	Published - 28 Dec 2009
Externally published	Yes

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.200901561

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abstract = "Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films. Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process. (Figure Presented).",

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AU - Falcaro, Paolo

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AU - Vaccari, Lisa

AU - Amenitsch, Heinz

AU - Marmiroli, Benedetto

AU - Grenci, Gianluca

AU - Innocenzi, Plinio

PY - 2009/12/28

Y1 - 2009/12/28

N2 - Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films. Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process. (Figure Presented).

AB - Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films. Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process. (Figure Presented).

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DO - 10.1002/adma.200901561

M3 - Article

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Fabrication of advanced functional devices combining soft chemistry with X-ray lithography in one step

Abstract

ASJC Scopus subject areas

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