Materials synthesis and processing by deep X-ray lithography

Benedetta Marmiroli; Paolo Falcaro; Luca Malfatti; Marco Faustini; Cara M. Doherty; David Grosso; Plinio Innocenzi; Heinz Amenitsch

Materials synthesis and processing by deep X-ray lithography

Benedetta Marmiroli, Paolo Falcaro, Luca Malfatti, Marco Faustini, Cara M. Doherty, David Grosso, Plinio Innocenzi, Heinz Amenitsch

Institute of Inorganic Chemistry (6330)

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2013
Event	HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology) - Berlin Duration: 21 Apr 2013 → 24 Apr 2013

Conference

Conference	HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology)
City	Berlin
Period	21/04/13 → 24/04/13

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Cite this

@conference{824ad02a98664d0faccff2da271f029e,

title = "Materials synthesis and processing by deep X-ray lithography",

author = "Benedetta Marmiroli and Paolo Falcaro and Luca Malfatti and Marco Faustini and Doherty, {Cara M.} and David Grosso and Plinio Innocenzi and Heinz Amenitsch",

year = "2013",

language = "English",

note = "HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology) ; Conference date: 21-04-2013 Through 24-04-2013",

}

TY - CONF

T1 - Materials synthesis and processing by deep X-ray lithography

AU - Marmiroli, Benedetta

AU - Falcaro, Paolo

AU - Malfatti, Luca

AU - Faustini, Marco

AU - Doherty, Cara M.

AU - Grosso, David

AU - Innocenzi, Plinio

AU - Amenitsch, Heinz

PY - 2013

Y1 - 2013

UR - http://www.harmnst2013.org/

M3 - Poster

T2 - HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology)

Y2 - 21 April 2013 through 24 April 2013

ER -

Materials synthesis and processing by deep X-ray lithography

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Other files and links

Cite this