Optical arrangement and proof of concept prototype for mid infrared variable angle spectroscopic ellipsometry

Eduard Gilli; Martin Kornschober; Robert Schennach

doi:10.1016/j.infrared.2011.09.006

Optical arrangement and proof of concept prototype for mid infrared variable angle spectroscopic ellipsometry

Eduard Gilli, Martin Kornschober, Robert Schennach

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	84-92
Journal	Infrared Physics & Technology
Volume	55
DOIs	https://doi.org/10.1016/j.infrared.2011.09.006
Publication status	Published - 2012

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Access to Document

10.1016/j.infrared.2011.09.006

Optische Anordnung für Ellipso - Optical unit for spectroscopic ellipsometry
Schennach, R., Kornschober, M. & Gilli, E.
1/10/09 → 31/03/11
Project: Research project
CD-Laboratory for Surface Chemical and Physical Fundamentals Of Paper Strength
Hirn, U., Bauer, W., Suppan, L., Miletzky, F. A., Diebald, S., Fischer, W. J., Gilli, E., Schennach, E., Lahti, J. A., Weber, F. & Schennach, R.
1/03/07 → 31/10/14
Project: Research project

Cite this

@article{f0cc13c2bbd048d79c6938d63e3973e9,

title = "Optical arrangement and proof of concept prototype for mid infrared variable angle spectroscopic ellipsometry",

author = "Eduard Gilli and Martin Kornschober and Robert Schennach",

year = "2012",

doi = "10.1016/j.infrared.2011.09.006",

language = "English",

volume = "55",

pages = "84--92",

journal = " Infrared Physics & Technology ",

issn = "1879-0275",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Optical arrangement and proof of concept prototype for mid infrared variable angle spectroscopic ellipsometry

AU - Gilli, Eduard

AU - Kornschober, Martin

AU - Schennach, Robert

PY - 2012

Y1 - 2012

U2 - 10.1016/j.infrared.2011.09.006

DO - 10.1016/j.infrared.2011.09.006

M3 - Article

SN - 1879-0275

VL - 55

SP - 84

EP - 92

JO - Infrared Physics & Technology

JF - Infrared Physics & Technology

ER -

Optical arrangement and proof of concept prototype for mid infrared variable angle spectroscopic ellipsometry

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Projects

Optische Anordnung für Ellipso - Optical unit for spectroscopic ellipsometry

CD-Laboratory for Surface Chemical and Physical Fundamentals Of Paper Strength

Cite this