Abstract
Micro-Electro-Mechanical-Systems (MEMS) shutter devices are mostly known for optical applications as seen in the James Webb Space Telescope. Besides optics, shutter devices also find application in sound generation as for example Advanced Digital Sound Reconstruction as
well as photo-acoustic gas sensors. In these applications, the damping as well as the sealing properties of the shutter is fundamental to the overall principle. A single unit cell of such an acoustic shutter device can be seen as a meta material which interacts with the acoustic wave.
Due to the size of MEMS shutters, viscous effects as well as the back-coupling from the built up acoustic pressure has to be taken into account. In order to optimize such a device taking all necessary effects into account, a parameter study utilizing the linearized compressible flow
equations formulated in an arbitrary Lagrangian-Eulerian (ALE) framework has been carried out. These equations are iteratively coupled to a standard mechanic computation as well as an artificial quasi-static mechanical computation governing the domain movement. Finally, based on the parameter study, an optimal point of operation with respect to certain hardware restrictions as for example the stiffness of the actuator as well as the necessary operating
pressure has been evaluated.
well as photo-acoustic gas sensors. In these applications, the damping as well as the sealing properties of the shutter is fundamental to the overall principle. A single unit cell of such an acoustic shutter device can be seen as a meta material which interacts with the acoustic wave.
Due to the size of MEMS shutters, viscous effects as well as the back-coupling from the built up acoustic pressure has to be taken into account. In order to optimize such a device taking all necessary effects into account, a parameter study utilizing the linearized compressible flow
equations formulated in an arbitrary Lagrangian-Eulerian (ALE) framework has been carried out. These equations are iteratively coupled to a standard mechanic computation as well as an artificial quasi-static mechanical computation governing the domain movement. Finally, based on the parameter study, an optimal point of operation with respect to certain hardware restrictions as for example the stiffness of the actuator as well as the necessary operating
pressure has been evaluated.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 10th Convention of the European Acoustics Association Forum Acusticum 2023 |
| Subtitle of host publication | acoustics for a green world : 10th Convention of the European Acoustics Association, Turin, Italy, 11th-15th September 2023, Politecnico di Torino |
| Number of pages | 8 |
| ISBN (Electronic) | 978-88-88942-67-4 |
| Publication status | Published - 2023 |
| Event | Forum Acusticum 2023: 10th Convention of the European Acoustics Assoiation - Turin, Italy Duration: 11 Sept 2023 → 15 Sept 2023 |
Conference
| Conference | Forum Acusticum 2023 |
|---|---|
| Abbreviated title | FA 2023 |
| Country/Territory | Italy |
| City | Turin |
| Period | 11/09/23 → 15/09/23 |