Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

Robert Winkler, Aleksandra Szkudlarek, Ivo Utke, Harald Plank

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2013
Event	MNE - 39th International Conference on Micro and Nano Engineering - London Duration: 16 Sept 2013 → 19 Sept 2013

Conference	MNE - 39th International Conference on Micro and Nano Engineering
City	London
Period	16/09/13 → 19/09/13

Fields of Expertise

@conference{cc43eeb0639244378354d470319469c8,

title = "Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures",

author = "Robert Winkler and Aleksandra Szkudlarek and Ivo Utke and Harald Plank",

year = "2013",

language = "English",

note = "MNE - 39th International Conference on Micro and Nano Engineering ; Conference date: 16-09-2013 Through 19-09-2013",

}

TY - CONF

T1 - Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

AU - Winkler, Robert

AU - Szkudlarek, Aleksandra

AU - Utke, Ivo

AU - Plank, Harald

PY - 2013

Y1 - 2013

M3 - Poster

T2 - MNE - 39th International Conference on Micro and Nano Engineering

Y2 - 16 September 2013 through 19 September 2013

ER -