Quantitative EDXS: Influence of geometry on a four detector system

Johanna Kraxner, Margit Schäfer, Otto Röschel, Gerald Kothleitner, Georg Haberfehlner, Manuel Paller, Werner Grogger

Research output: Contribution to journalArticlepeer-review


The influence of the geometry on quantitative energy dispersive X-ray spectrometry (EDXS) analysis is determined for a ChemiSTEM system (Super-X) in combination with a low-background double-tilt specimen holder. For the first time a combination of experimental measurements with simulations is used to determine the positions of the individual detectors of a Super-X system. These positions allow us to calculate the detector's solid angles and estimate the amount of detector shadowing and its in fluence on quantitative EDXS analysis,
including absorption correction using the ζ-factor method. Both shadowing by the brass portions and theberyllium specimen carrier of the holder severely affect the quanti fication of low to medium atomic number elements. A multi detector system is discussed in terms of practical consequences of the described effects, and a quantitative evaluation of a Fayalit sample is demonstrated. Corrections and suggestions for minimizing systematic errors are discussed to improve quantitative methods for a multi-detector system.
Original languageEnglish
Pages (from-to)30-39
Publication statusPublished - 2017

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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