Quantitative Elemental Mapping at Atomic Resolution Using X-Ray Spectroscopy

Gerald Kothleitner, M.J. Neish, N.R. Lugg, S.D. Findlay, Werner Grogger, Ferdinand Hofer, L.J. Allen

Research output: Contribution to journalArticlepeer-review


Elemental mapping using energy-dispersive x-ray spectroscopy in scanning transmission electron microscopy, a well-established technique for precision elemental concentration analysis at submicron resolution, was first demonstrated at atomic resolution in 2010. However, to date atomic resolution elemental maps have only been interpreted qualitatively because the elastic and thermal scattering of the electron probe confounds quantitative analysis. Accounting for this scattering, we present absolute scale quantitative comparisons between experiment and quantum mechanical calculations for both energy dispersive x-ray and electron energy-loss spectroscopy using off-axis reference measurements. The relative merits of removing the scattering effects from the experimental data against comparison with direct simulations are explored.
Original languageEnglish
Article number085501
Number of pages5
JournalPhysical Review Letters
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)


Dive into the research topics of 'Quantitative Elemental Mapping at Atomic Resolution Using X-Ray Spectroscopy'. Together they form a unique fingerprint.

Cite this