Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H2O Reactions

Barbara Geier, Christian Gspan, Jason D. Fowlkes, Harald Matthias Fitzek, Sebastian Rauch, Johannes Rattenberger, Robert Winkler, Philip D. Rack, Harald Plank*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Search results

  • Research project

    Functional Nanofabrication

    Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.

    1/01/09 → 31/12/23

    Project: Research project