Simulating the pressure limiting system of Environmental Scanning Electron Microscopes using the direct simulation Monte-Carlo method

Research output: Contribution to conference › Abstract › peer-review

Original language	English
Pages	25-25
Publication status	Published - 2015
Event	5th ASEM Workshop - Graz, Austria Duration: 7 Jun 2015 → 8 Jun 2015

Fields of Expertise

@conference{30954c3bbf8043f99a0d3ca298f81fc9,

title = "Simulating the pressure limiting system of Environmental Scanning Electron Microscopes using the direct simulation Monte-Carlo method",

author = "Fitzek, {Harald Matthias} and Hartmuth Schr{\"o}ttner and Julian Wagner and Ferdinand Hofer and Johannes Rattenberger",

year = "2015",

language = "English",

pages = "25--25",

note = "5th ASEM Workshop ; Conference date: 07-06-2015 Through 08-06-2015",

}

TY - CONF

T1 - Simulating the pressure limiting system of Environmental Scanning Electron Microscopes using the direct simulation Monte-Carlo method

AU - Fitzek, Harald Matthias

AU - Schröttner, Hartmuth

AU - Wagner, Julian

AU - Hofer, Ferdinand

AU - Rattenberger, Johannes

PY - 2015

Y1 - 2015

M3 - Abstract

SP - 25

EP - 25

T2 - 5th ASEM Workshop

Y2 - 7 June 2015 through 8 June 2015

ER -