Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Anton Buchberger, Paul Maierhofer, Alexander Bergmann, Anderson Singulani, Martin Sagmeister, Victor Sidorov, Jochen Kraft, Marcus Baumgart, Andreas Tortschanoff

Research output: Chapter in Book/Report/Conference proceedingConference paperpeer-review


The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.
Original languageEnglish
Title of host publication2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
ISBN (Electronic)978-1-7281-1634-1
Publication statusPublished - 13 Jan 2020
EventIEEE Sensors 2019 - Palais des Congrès de Montréal, Montreal, Canada
Duration: 27 Oct 201930 Oct 2019

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


ConferenceIEEE Sensors 2019
Internet address


  • Particulate Matter
  • Single Particle
  • Evanescent field
  • Silicon Photonics
  • Silicon Nitride
  • Waveguide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fields of Expertise

  • Advanced Materials Science


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