Sputtering thin films for high resolution scanning electron microscopy

Johannes Rattenberger; Alexander Melischnig; Hartmuth Schröttner; Ilse Letofsky-Papst; Sabrina Mertschnigg; Ferdinand Hofer

Sputtering thin films for high resolution scanning electron microscopy

Johannes Rattenberger, Alexander Melischnig, Hartmuth Schröttner, Ilse Letofsky-Papst, Sabrina Mertschnigg, Ferdinand Hofer

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2014
Event	18th IMC 2014 Prag - Prag, Czech Republic Duration: 7 Sept 2014 → 12 Sept 2014

Conference

Conference	18th IMC 2014 Prag
Country/Territory	Czech Republic
City	Prag
Period	7/09/14 → 12/09/14

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Cite this

@conference{2fda5447eb5e473193ee2007d56eed84,

title = "Sputtering thin films for high resolution scanning electron microscopy",

author = "Johannes Rattenberger and Alexander Melischnig and Hartmuth Schr{\"o}ttner and Ilse Letofsky-Papst and Sabrina Mertschnigg and Ferdinand Hofer",

year = "2014",

language = "English",

note = "18th IMC 2014 Prag ; Conference date: 07-09-2014 Through 12-09-2014",

}