Abstract
A well-controlled low-temperature process, demonstrated from 350 °C to 500 °C, has been developed for epitaxially growing elevated contacts and near-ideal diode junctions of Al-doped Si in contact windows to the Si substrate. A physical-vapor-deposited (PVD) amorphous silicon layer is converted to monocrystalline silicon selectively in the contact windows by using a PVD aluminum layer as a transport medium. This is a solid-phase-epitaxy (SPE) process by which the grown Si is Al-doped to at least 1018 cm-3. Contact resistivity below 10-7 Ω · cm 2 is achieved to both p- and p+ bulk-silicon regions. The elevated contacts have also been employed to fabricate p+-n diodes and p+-n-p bipolar transistors, the electrical characterization of which indicates a practically defect-free epitaxy at the interface.
Original language | English |
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Pages (from-to) | 341-343 |
Number of pages | 3 |
Journal | IEEE Electron Device Letters |
Volume | 27 |
Issue number | 5 |
DOIs | |
Publication status | Published - May 2006 |
Externally published | Yes |
Keywords
- Al-doping
- Elevated contacts
- Low-ohmic contacts
- Low-temperature processing
- p-n-p bipolar junction transistors
- Solid-phase epitaxy
- Ultra-shallow junctions
ASJC Scopus subject areas
- Electrical and Electronic Engineering