Surface Characterization of Silicon Wafers

Thomas Bodner, Frank Wiesbrock, Franz Stelzer

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original languageGerman
Publication statusPublished - 17 Nov 2010
EventChemistry and Technology of Materials - TU Graz, Austria
Duration: 14 Jan 2010 → …

Conference

ConferenceChemistry and Technology of Materials
Country/TerritoryAustria
CityTU Graz
Period14/01/10 → …

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

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