@inproceedings{37cc62cba8b14008ab95b3e3277bb2bb,
title = "TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization",
author = "Werner Grogger and Bernhard Schaffer and Ferdinand Hofer",
year = "2005",
language = "English",
isbn = "1-56677-428-4",
volume = "4",
series = "Their Impact and Control in Device Manufacturing IV",
publisher = "The Electrochemical Society",
pages = "106--112",
booktitle = "Crystalline Defects and Contamination: DECON 2005",
note = "DECON2005 ; Conference date: 15-09-2005 Through 16-09-2005",
}