Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation

Robert Winkler; Aleksandra Szkudlarek; Jason D. Fowlkes; Philip D. Rack; Ivo Utke; Harald Plank

doi:10.1021/am508052k

Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation

Robert Winkler, Aleksandra Szkudlarek, Jason D. Fowlkes, Philip D. Rack, Ivo Utke, Harald Plank

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	3289-3297
Journal	ACS Applied Materials & Interfaces
Issue number	7
DOIs	https://doi.org/10.1021/am508052k
Publication status	Published - 2015

Fields of Expertise

Advanced Materials Science

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10.1021/am508052k

Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → 31/12/23
Project: Research project

Cite this

@article{c4896df1bb6e4f28abbe4ba05d8b762d,

title = "Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation",

author = "Robert Winkler and Aleksandra Szkudlarek and Fowlkes, {Jason D.} and Rack, {Philip D.} and Ivo Utke and Harald Plank",

year = "2015",

doi = "10.1021/am508052k",

language = "English",

pages = "3289--3297",

journal = "ACS Applied Materials & Interfaces",

issn = "1944-8252 ",

publisher = "American Chemical Society",

number = "7",

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TY - JOUR

T1 - Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation

AU - Winkler, Robert

AU - Szkudlarek, Aleksandra

AU - Fowlkes, Jason D.

AU - Rack, Philip D.

AU - Utke, Ivo

AU - Plank, Harald

PY - 2015

Y1 - 2015

U2 - 10.1021/am508052k

DO - 10.1021/am508052k

M3 - Article

SN - 1944-8252

SP - 3289

EP - 3297

JO - ACS Applied Materials & Interfaces

JF - ACS Applied Materials & Interfaces

IS - 7

ER -

Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation

Fields of Expertise

Treatment code (Nähere Zuordnung)

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Projects

Functional Nanofabrication

Cite this