Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation

Robert Winkler, Aleksandra Szkudlarek, Jason D. Fowlkes, Philip D. Rack, Ivo Utke, Harald Plank

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)3289-3297
JournalACS Applied Materials & Interfaces
Issue number7
Publication statusPublished - 2015

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  • Advanced Materials Science

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