Towards pure and compact FEBID deposits via e-beam assisted H2O purification at room temperature

Christian Gspan, Barbara Geier, Philip D. Fowlkes, Harald Plank

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 2014
EventCELINA Kick-Off (COST Action) - Erlangen (Germany)
Duration: 19 Mar 201422 Mar 2014


ConferenceCELINA Kick-Off (COST Action)
CityErlangen (Germany)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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