@inbook{7d5f5e3742784a84b0c6a2c9c60e87f5,
title = "3D Integration of MEMS and IC: Design, Technology and Simulations",
author = "Maaike Taklo and Kari Schj{\o}lberg-Henriksen and Nicolas Lietaer and Josef Prainsack and Anders Elfving and Josef Weber and Matthias Klein and Peter Schneider and Sven Reitz",
year = "2010",
doi = "10.1007/978-90-481-3807-4",
language = "English",
isbn = "978-90-481-3805-0",
volume = "3",
series = "NATO Science for Peace and Security Series B: Physics and Biophysics",
publisher = "Springer Netherlands",
pages = "191--203",
booktitle = "Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators",
address = "Netherlands",
edition = "1",
}