Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS

Christoph Pollak, Klaus Reichmann, Herbert Hutter

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Seiten (von - bis)	119-124
Fachzeitschrift	Surface and Coatings Technology
Jahrgang	150
Publikationsstatus	Veröffentlicht - 2002

Treatment code (Nähere Zuordnung)

@article{a9cf6985171e4e8ba0178306070f6380,

title = "Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS",

author = "Christoph Pollak and Klaus Reichmann and Herbert Hutter",

year = "2002",

language = "English",

volume = "150",

pages = "119--124",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}