@inproceedings{b8d6c9f850564dc0a40f92f14e859311,
title = "Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy",
author = "Werner Grogger and Ferdinand Hofer and Peter Warbichler and O. Leitner",
year = "1999",
language = "English",
isbn = "0-7503-0650-5",
volume = "164",
series = "Institute of Physics conference series",
publisher = "Institute of Physics Publ.",
pages = "35--38",
booktitle = "Microscopy of semiconducting materials 1999",
note = "Conference on Microscopy of Semiconducting Materials ; Conference date: 22-03-1999 Through 25-03-1999",
}