Optische Anordnung für Ellipso - Optical unit for spectroscopic ellipsometry

Schennach, Robert (Co-Investigator (CoI))
Kornschober, Martin (Co-Investigator (CoI))
Gilli, Eduard (Principal Investigator (PI))

Institute of Solid State Physics (5130)

Project: Research project

2 Patent
1 Conference paper
1 Poster
1 Article

2 results

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2011

Optische Anordnung für Ellipsometrie
Gilli, E., Schennach, R. & Kornschober, M., 15 Mar 2011, Patent No. AT 508690 A1
Research output: Patent
Optische Anordnung für Ellpisometrie
Gilli, E., Schennach, R. & Kornschober, M., 3 Mar 2011, Patent No. WO 2011/022745
Research output: Patent