Optische Anordnung für Ellipso - Optical unit for spectroscopic ellipsometry

Schennach, Robert (Co-Investigator (CoI))
Kornschober, Martin (Co-Investigator (CoI))
Gilli, Eduard (Principal Investigator (PI))

Institute of Solid State Physics (5130)

Project: Research project

2 Patent
1 Conference paper
1 Poster
1 Article

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2012

Optical arrangement and proof of concept prototype for mid infrared variable angle spectroscopic ellipsometry
Gilli, E., Kornschober, M. & Schennach, R., 2012, In: Infrared Physics & Technology . 55, p. 84-92
Research output: Contribution to journal › Article › peer-review