Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/10/99 → 31/05/00 |
Photoresist removal on integrated circuits by use of ozone
- Gamse, Thomas (Co-Investigator (CoI))
- Marr, Rolf-Jürgen (Co-Investigator (CoI))
Project: Research project
Project: Research project
| Status | Finished |
|---|---|
| Effective start/end date | 1/10/99 → 31/05/00 |