Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1610-1642
JournalPhysica Status Solidi (C) - Current Topics in Solid State Physics
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

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