Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Earth and Planetary Sciences

• Electron 100%
• Deposit 100%
• Electron Beam 50%
• Radii 50%
• Yield 50%
• Investigation 50%
• Gas Injection 50%
• Electron Microscope 50%
• Depth 50%
• Height 50%
• Condition 50%
• Scanning 50%
• Foci 50%
• Standard 50%
• Substrate 50%
• Diameter 50%
• Regime 50%

Engineering

• Single Line 100%
• Resolution Limit 100%
• Penetration Depth 50%
• Broadening 50%
• Scanning Electron Microscope 50%
• Gas Injection System 50%
• Substrates 50%
• Determines 50%
• Deposited Material 50%
• Line Width 50%

Physics

• Substrates 50%
• Linewidth 50%
• Diameters 50%
• Injection 50%
• Standard 50%