Growth, structure and stability of sputter-deposited MoS2 thin films

Reinhard Kaindl; Bernhard C. Bayer; Roland Resel; Thomas Müller; Viera Skakalova; Gerlinde Habler; Rainer Abart; Alexey S. Cherevan; Dominik Eder; Maxime Blatter; Fabian Fischer; Jannik C. Meyer; Dmitry K. Polyushkin; Wolfgang Waldhauser

doi:10.3762/bjnano.8.113

Growth, structure and stability of sputter-deposited MoS2 thin films

Reinhard Kaindl, Bernhard C. Bayer, Roland Resel, Thomas Müller, Viera Skakalova, Gerlinde Habler, Rainer Abart, Alexey S. Cherevan, Dominik Eder, Maxime Blatter, Fabian Fischer, Jannik C. Meyer, Dmitry K. Polyushkin, Wolfgang Waldhauser

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1115-1126
Journal	Beilstein Journal of Nanotechnology
Volume	8
DOIs	https://doi.org/10.3762/bjnano.8.113
Publication status	Published - 2017

Access to Document

10.3762/bjnano.8.113

Cite this

@article{c5c0a8eaa70b4a28b4a9c57f4839f19b,

title = "Growth, structure and stability of sputter-deposited MoS2 thin films",

author = "Reinhard Kaindl and Bayer, {Bernhard C.} and Roland Resel and Thomas M{\"u}ller and Viera Skakalova and Gerlinde Habler and Rainer Abart and Cherevan, {Alexey S.} and Dominik Eder and Maxime Blatter and Fabian Fischer and Meyer, {Jannik C.} and Polyushkin, {Dmitry K.} and Wolfgang Waldhauser",

year = "2017",

doi = "10.3762/bjnano.8.113",

language = "English",

volume = "8",

pages = "1115--1126",

journal = "Beilstein Journal of Nanotechnology ",

issn = "2190-4286",

publisher = "Beilstein-Institut zur F{\"o}rderung der Chemischen Wissenschaften",

}

TY - JOUR

T1 - Growth, structure and stability of sputter-deposited MoS2 thin films

AU - Kaindl, Reinhard

AU - Bayer, Bernhard C.

AU - Resel, Roland

AU - Müller, Thomas

AU - Skakalova, Viera

AU - Habler, Gerlinde

AU - Abart, Rainer

AU - Cherevan, Alexey S.

AU - Eder, Dominik

AU - Blatter, Maxime

AU - Fischer, Fabian

AU - Meyer, Jannik C.

AU - Polyushkin, Dmitry K.

AU - Waldhauser, Wolfgang

PY - 2017

Y1 - 2017

U2 - 10.3762/bjnano.8.113

DO - 10.3762/bjnano.8.113

M3 - Article

SN - 2190-4286

VL - 8

SP - 1115

EP - 1126

JO - Beilstein Journal of Nanotechnology

JF - Beilstein Journal of Nanotechnology

ER -