High dose proton implantations into silicon: a combined EBIC, SRP and TEM study

Stefan Kirnstötter*, Martin Faccinelli, Christian Gspan, Werner Grogger, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Medicine and Dentistry

Biochemistry, Genetics and Molecular Biology