Abstract
Investigation of the piezoelectric response of zinc oxide films prepared by plasma-enhanced atomic layer deposition (PE-ALD). The influence of the substrate as well as the substrate temperature during deposition is investigated. Films deposited on flexible polyethylene terephthalate (PET) generated higher piezoelectric current (> 1.8 nA) compared to films deposited on glass (> 0.3 nA) due to substrate bending. The generated piezoelectric current is enhanced at increased temperatures due to improved growth along the (002) crystallographic orientation.
| Original language | English |
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| Publication status | Published - 28 Sept 2020 |