Polymerisation von 2-Oxazolinen und deren Anwendung in der Photolithographie

Martin Fimberger, Andreas Behrendt, Franz Stelzer, Frank Wiesbrock

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	German
Publication status	Published - 22 Jun 2015
Event	Chemistry and Technology of Materials - Duration: 23 Nov 2011 → 8 Jun 2015

Conference	Chemistry and Technology of Materials
Period	23/11/11 → 8/06/15

Fields of Expertise

@conference{decd36baf6ff422f8f9009aba9f3e376,

title = "Polymerisation von 2-Oxazolinen und deren Anwendung in der Photolithographie",

author = "Martin Fimberger and Andreas Behrendt and Franz Stelzer and Frank Wiesbrock",

year = "2015",

month = jun,

day = "22",

language = "deutsch",

note = "Chemistry and Technology of Materials ; Conference date: 23-11-2011 Through 08-06-2015",

}