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Abstract
This work proposes a computationally ecient observation algorithm for the surface temperature profile of heated silicon wafers. The observer exploits the fact that only a few modes of the original large-order model are unstable or slowly converging. In this case, it suffices to modify only these modes by the observer's output feedback gain. Compared to classical observation techniques, the proposed method allows to compute the feedback gain for a state space of lower dimension, which reduces computational complexity. A comparison of the approach with the extended Kalman-Bucy filter using experimental data shows its appealing
performance.
performance.
Originalsprache | englisch |
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Titel | IFAC-PapersOnLine: Proceedings of the 21st IFAC World Congress |
Seiten | 5952-5957 |
Band | 53 (2) |
DOIs | |
Publikationsstatus | Veröffentlicht - 2020 |
Veranstaltung | 21st IFAC World Congress - Virtuell, Deutschland Dauer: 12 Juli 2020 → 17 Juli 2020 |
Konferenz
Konferenz | 21st IFAC World Congress |
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Kurztitel | IFAC 2020 |
Land/Gebiet | Deutschland |
Ort | Virtuell |
Zeitraum | 12/07/20 → 17/07/20 |
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Boano, C. A., Kubin, G., Bloem, R., Horn, M., Pernkopf, F., Zakany, N., Mangard, S., Witrisal, K., Römer, K. U., Aichernig, B., Bösch, W., Baunach, M. C., Tappler, M., Malenko, M., Weiser, S., Eichlseder, M., Leitinger, E., Grosinger, J., Großwindhager, B., Ebrahimi, M., Alothman Alterkawi, A. B., Knoll, C., Teschl, R., Saukh, O., Rath, M., Steinberger, M., Steinbauer-Wagner, G. & Tranninger, M.
1/01/16 → 31/03/22
Projekt: Forschungsprojekt